ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,595, issued on July 28, was assigned to LAM RESEARCH Corp. (Fremont, Calif.). "Automated cleaning of robot arms of substrate processing sys... Read More
ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,596, issued on July 28, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan). "Cover ring and ground shield fo... Read More
ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,597, issued on July 28, was assigned to JUSUNG ENGINEERING Co. LTD. (South Korea). "Thin film deposition method" was invented by Yong Hyun ... Read More
ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,598, issued on July 28, was assigned to LOTUS APPLIED TECHNOLOGY LLC (Hillsboro, Ore.). "Methods and systems for improved deposition produc... Read More
ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,599, issued on July 28, was assigned to ASM IP Holding B.V. (Almere, Netherlands). "Fill vessels and connectors for chemical sublimators" w... Read More
ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,600, issued on July 28, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea). "Precursor supply system" was invented by Kyu... Read More
ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,601, issued on July 28, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Apparatus and system for delivering gas to a process... Read More
ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,602, issued on July 28, was assigned to AIXTRON SE (Herzogenrath, Germany). "Wall-cooled gas-inlet element for a CVD reactor" was invented ... Read More
ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,603, issued on July 28, was assigned to CARL ZEISS SMT GMBH (Oberkochen, Germany). "Method and apparatus for deposition of at least one lay... Read More
ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,604, issued on July 28, was assigned to AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION (Suwon-si, South Korea). "Preparing method... Read More